PANDIA — Lithography

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Some of the main features of the flagship system:

- Scrolling availability for larger building areas: PANDIA is designed for moving exposure while calculations are done onboard.

- Stackability for more productivity: The small width of the system allows projectors to be lined up down to very small pixel sizes to build systems with large building areas.

- An open system with unlimited options for customizing: The built-in FPGA allows users to customize their applications or use prepared Software. The onboard FPGA opens up to 7 Gigabytes for image storage, programming logic, and DSP slices for customization.

- Multiple wavelengths for working with multi-materials: two independent illumination modules provide up to three different wavelengths.

- Variability: Pandia comes with a telecentric lens with a pixel size of 10um; any other resolutions can be easily realized with custom lens developments in-house at IN-VISION.

- Watercooled system for highest optical power: The optimized water cooling provides full power for all applications – up to 9 watts per wavelength.

- High-Speed Data Interface: Maximum transfer rates are realized using Gigabit Ethernet or an optical data interface, which is flexible, lossless over long distances, and immune to electromagnetic interference.

- Field changeability of the illumination modules: The customer can easily swap out the two LED modules, which does not require further calibration or set-up. This can be done after thousands of hours of uptime without degradation.

- Onboard User-Interface for operators: An onboard HMI informs the operator about the operating status and critical parameters.

Micromirror array size2560 x 1600
Wavelengths (LED)365, 385, 405, 460nm
Number of simultaneous wavelenghtsup to 3
Image Resolution2K
Image Size25.605mm x 16.003mm (10um Lens)
Standard lenses2.8µm, 10µm, 50µm (others on request)
Optical output powerup to 9 W/Wavelength
ContrastMin. 1:300 (ANSI)
Uniformity> 90% (without software correction)
Software optionsScrolling algorithms; DMD rotation compensation, grayscaling
Cooling systemWatercooled
InterfacesGigabit Ethernet, Optical PCIe
Software options (excerpt)Scrolling algorithms; DMD rotation compensation, grayscaling